69101 - Kaijo 69101 - HI Megasonic Series, High frequency ultrasonic cleaning...
- Part Number:
- 69101
- Model Number:
- 69101
- Make:
- KAIJO
- Lead Time:
- Available
- Qty In Stock:
- Available
Kaijo 69101 - HI Megasonic Series, High frequency ultrasonic cleaning system Simple Type: Electric Power Generator
A precision cleaning system developed for the unique requirements of the Semiconductor, FPD, Hard Disc, and Crystal industries. Kaijo, a world leading manufacturer of semiconductor processing equipment, has developed a new HI MEGASONIC cleaning system. KAIJO HI MEGASONIC series utilizes high frequencies to remove particles to less than 2.0um. Conventional 28-50kHz ultrasonic cleaning systems do not have the energy to remove submicron particles. HI MEGASONIC series operates at 950kHz, the shorter wavelength promotes submicron particle removal by accelerating water molecules to greater than 2X105G. The 950kHz high frequency system eliminates the risk of damage due to cavitation.
For Resellers and High Volume Orders:
Please request a quote to obtain preferred pricing.
Features
- 2MHz eliminate damages in less than 65nm patterms.Suitable for 200mm and 300mm wafer
- 950kHz High frequency removes sub-micron particles by 10 5G acceleration.
- Central control for output power/Feedback of operation status(self-analysis function).
- cleaning.
- Constant output is controllable with the digital Display(with upper and lower limits detector function).
- Internal CPU enables mutual communication to the host computer.
- POWER MOS FET has improved efficient oscillation.
- Uniform cleaning and less damages to micro patterns.
Specifications
- Ambient temperature: 0-40C
- Frequency: 2MHz
- Frequency control: Auto PLL
- Humidity: 0-80%(No dew condensation)
- Max. Output Power: 450W
- Oscillation method: VCO
- Outer Dimensions (W x D x H mm): 320 x 520 x 144
- Output display: 7 segments 3 digits LED
- Power Source: AC200 6A
- Remote control machanism: Yes
- Weight: 17kg
Applications
- None Available
Aliases
- None Available
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