6879BK - Kaijo 6879BK - Ultra Sonic Shower, Suitable for flat panel and wafer cleaning

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6879BK - Kaijo 6879BK - Ultra Sonic Shower, Suitable for flat panel...

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Part Number:: 6879BK
Model Number:: 6879BK
Make:: KAIJO
Lead Time:: Available
Qty In Stock:: Available

Kaijo 6879BK - Ultra Sonic Shower, Suitable for flat panel and wafer cleaning Simple Type: Electric Power Generator

Download the datasheet (PDF)

For Resellers and High Volume Orders:
Please request a quote to obtain preferred pricing.

Features

Available to be equipped with in FPD cleaner with backside cleaning of substrate
Less substrate damage due to higher frequency
Precise cleaning by HI Megasonic cleaning of less than 0.2u m particles

Specifications

General

Connections Cable: Transducer: 5Mx2. Sensor: 5Mx1
Effective area: 330mm
Frequency: 950kHz
Interior Treatment: Multiple Electrolytic Grinding
Liquid Temperature: Max. 70C
Liquid Volume: 20 - 25L/min
Material of Chassis: SU316L
Material of Plate: SU316L
Max output power: 600W
Protection Circuit: Liquid level warning (lower limit)
Weight: 5kg

Applications

None Available

Aliases

None Available